JPH0430727U - - Google Patents
Info
- Publication number
- JPH0430727U JPH0430727U JP7284590U JP7284590U JPH0430727U JP H0430727 U JPH0430727 U JP H0430727U JP 7284590 U JP7284590 U JP 7284590U JP 7284590 U JP7284590 U JP 7284590U JP H0430727 U JPH0430727 U JP H0430727U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace
- diffusion
- furnace core
- cap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7284590U JPH0430727U (en]) | 1990-07-09 | 1990-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7284590U JPH0430727U (en]) | 1990-07-09 | 1990-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0430727U true JPH0430727U (en]) | 1992-03-12 |
Family
ID=31611145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7284590U Pending JPH0430727U (en]) | 1990-07-09 | 1990-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0430727U (en]) |
-
1990
- 1990-07-09 JP JP7284590U patent/JPH0430727U/ja active Pending